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A linear air bearing stage with active magnetic preloads for ultraprecise straight motion Ro, Seung-Kook; Kim, Soohyun; Kwak, Yoon Keun; Park, Chun Hong, PRECISION ENGINEERING-JOURNAL OF THE INTERNATIONAL SOCIETIES FOR PRECISION ENGINEERING AND NANOTECHNOLOGY, v.34, pp.186 - 194, 2010-01 |
A six-degree-of-freedom magnetic levitation fine stage for a high-precision and high-acceleration dual-servo stage Kim, Myeong-Hyeon; Jeong, Jae Heon; Kim, HyoYoung; Gweon, Dae-Gab, SMART MATERIALS AND STRUCTURES, v.24, no.10, 2015-10 |
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