Showing results 1 to 1 of 1
Capacitive Sensing Type SUrface Micromachined Silicon Accelerometer with Stiffness Tuning Capability Park, K.Y.; Lee, Chong-Won; Jang, H.S.; Oh, Y.S.; Ha, B.J., Int. Workshop on Micro Electro Mechanical Systems(MEMS98), 1998-01 |
Discover