DC Field | Value | Language |
---|---|---|
dc.contributor.author | Kim, MJ | - |
dc.contributor.author | Cho, Young-Ho | - |
dc.date.accessioned | 2013-03-16T09:34:10Z | - |
dc.date.available | 2013-03-16T09:34:10Z | - |
dc.date.created | 2012-02-06 | - |
dc.date.issued | 1999-11-14 | - |
dc.identifier.citation | ASME, v., no., pp.101 - 103 | - |
dc.identifier.uri | http://hdl.handle.net/10203/129925 | - |
dc.language | ENG | - |
dc.title | Residual Stress and Thickness Control of Piezoelectric Multi-layer Micromirror Actuators for Initial Deflection Minimization | - |
dc.type | Conference | - |
dc.type.rims | CONF | - |
dc.citation.beginningpage | 101 | - |
dc.citation.endingpage | 103 | - |
dc.citation.publicationname | ASME | - |
dc.identifier.conferencecountry | United States | - |
dc.identifier.conferencecountry | United States | - |
dc.contributor.localauthor | Cho, Young-Ho | - |
dc.contributor.nonIdAuthor | Kim, MJ | - |
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