Residual Stress and Thickness Control of Piezoelectric Multi-layer Micromirror Actuators for Initial Deflection Minimization

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Issue Date
1999-11-14
Language
ENG
Citation

ASME, pp.101 - 103

URI
http://hdl.handle.net/10203/129925
Appears in Collection
BiS-Conference Papers(학술회의논문)
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