Preparation and Characterization (Pb, Sr)TiO3 Thin films for Capacitor of ULSI DRAM by Liquid Source Misted Chemical Deposition
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Chung, HJ | - |
| dc.contributor.author | Woo, Seong-Ihl | - |
| dc.date.accessioned | 2013-03-16T09:31:43Z | - |
| dc.date.available | 2013-03-16T09:31:43Z | - |
| dc.date.created | 2012-02-06 | - |
| dc.date.issued | 1999 | - |
| dc.identifier.citation | The 12th Symposium on Chemical Engineering Taejeon/Chungnam-Kyushu, v., no., pp.133 - 134 | - |
| dc.identifier.uri | http://hdl.handle.net/10203/129911 | - |
| dc.language | ENG | - |
| dc.title | Preparation and Characterization (Pb, Sr)TiO3 Thin films for Capacitor of ULSI DRAM by Liquid Source Misted Chemical Deposition | - |
| dc.type | Conference | - |
| dc.type.rims | CONF | - |
| dc.citation.beginningpage | 133 | - |
| dc.citation.endingpage | 134 | - |
| dc.citation.publicationname | The 12th Symposium on Chemical Engineering Taejeon/Chungnam-Kyushu | - |
| dc.identifier.conferencecountry | South Korea | - |
| dc.identifier.conferencecountry | South Korea | - |
| dc.contributor.localauthor | Woo, Seong-Ihl | - |
| dc.contributor.nonIdAuthor | Chung, HJ | - |
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