DC Field | Value | Language |
---|---|---|
dc.contributor.author | 이광철 | - |
dc.contributor.author | 이성근 | - |
dc.contributor.author | 문상준 | - |
dc.contributor.author | 이승섭 | - |
dc.date.accessioned | 2013-03-16T09:20:05Z | - |
dc.date.available | 2013-03-16T09:20:05Z | - |
dc.date.created | 2012-02-06 | - |
dc.date.issued | 2001 | - |
dc.identifier.citation | 1st Intelligent Microsystem, v., no., pp.180 - 183 | - |
dc.identifier.uri | http://hdl.handle.net/10203/129818 | - |
dc.language | KOR | - |
dc.title | Deep X-ray Mask Embedded in Electrostatic Actuator for 3-D LIGAProcess | - |
dc.type | Conference | - |
dc.type.rims | CONF | - |
dc.citation.beginningpage | 180 | - |
dc.citation.endingpage | 183 | - |
dc.citation.publicationname | 1st Intelligent Microsystem | - |
dc.identifier.conferencecountry | South Korea | - |
dc.identifier.conferencecountry | South Korea | - |
dc.contributor.localauthor | 이승섭 | - |
dc.contributor.nonIdAuthor | 이광철 | - |
dc.contributor.nonIdAuthor | 이성근 | - |
dc.contributor.nonIdAuthor | 문상준 | - |
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