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College of Engineering(공과대학)Dept. of Materials Science and Engineering(신소재공학과)MS-Conference Papers(학술회의논문)

In-situ plasma diagnosis of chemical species in microwave plasma-assisted chemical vapour deposition for the growth of carbon nanotubes using CH4/H2/NH3 gases

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dc.contributor.authorWoo, YS-
dc.contributor.authorHan, IT-
dc.contributor.authorLee, NS-
dc.contributor.authorJung, JE-
dc.contributor.authorJeon, Duk Young-
dc.contributor.authorKim, JM-
dc.date.accessioned2013-03-16T07:53:44Z-
dc.date.available2013-03-16T07:53:44Z-
dc.date.created2012-02-06-
dc.date.issued2000-04-25-
dc.identifier.citationElectron-Emissive Materials, Vacuum Microelectronics and Flat-Panel Displays, v.621, no., pp. --
dc.identifier.issn0272-9172-
dc.identifier.urihttp://hdl.handle.net/10203/129068-
dc.languageENG-
dc.titleIn-situ plasma diagnosis of chemical species in microwave plasma-assisted chemical vapour deposition for the growth of carbon nanotubes using CH4/H2/NH3 gases-
dc.typeConference-
dc.identifier.scopusid2-s2.0-0034431153-
dc.type.rimsCONF-
dc.citation.volume621-
dc.citation.publicationnameElectron-Emissive Materials, Vacuum Microelectronics and Flat-Panel Displays-
dc.identifier.conferencecountryUnited States-
dc.identifier.conferencecountryUnited States-
dc.contributor.localauthorJeon, Duk Young-
dc.contributor.nonIdAuthorWoo, YS-
dc.contributor.nonIdAuthorHan, IT-
dc.contributor.nonIdAuthorLee, NS-
dc.contributor.nonIdAuthorJung, JE-
dc.contributor.nonIdAuthorKim, JM-
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MS-Conference Papers(학술회의논문)
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