분광 결상 타원 계측기를 위한 결상 분광기의 설계 및 시료 측정Imaging Spectrograph for Spectral Imaging Ellipsometer : Design and Experiments
- Publisher
- 대한기계학회
- Issue Date
- 2002
- Language
- KOR
- Citation
대한기계학회 2002년도 추계학술대회, v.2, pp.965 - 969
- Appears in Collection
- ME-Conference Papers(학술회의논문)ME-Conference Papers(학술회의논문)
- Files in This Item
- There are no files associated with this item.
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