DC Field | Value | Language |
---|---|---|
dc.contributor.author | Bai, KH | - |
dc.contributor.author | Hong, JI | - |
dc.contributor.author | Kim, SS | - |
dc.contributor.author | Chang, Hong-Young | - |
dc.date.accessioned | 2013-03-16T05:43:27Z | - |
dc.date.available | 2013-03-16T05:43:27Z | - |
dc.date.created | 2012-02-06 | - |
dc.date.issued | 2000 | - |
dc.identifier.citation | 53rd Annual Gaseous Electronic Conference, v., no., pp. - | - |
dc.identifier.uri | http://hdl.handle.net/10203/128047 | - |
dc.language | ENG | - |
dc.publisher | APS Physics | - |
dc.title | Electron Temperature control in ICP using grid and its use for control the ion ratio in CF4 / Ar plasma | - |
dc.type | Conference | - |
dc.type.rims | CONF | - |
dc.citation.publicationname | 53rd Annual Gaseous Electronic Conference | - |
dc.identifier.conferencecountry | United States | - |
dc.identifier.conferencecountry | United States | - |
dc.contributor.localauthor | Chang, Hong-Young | - |
dc.contributor.nonIdAuthor | Bai, KH | - |
dc.contributor.nonIdAuthor | Hong, JI | - |
dc.contributor.nonIdAuthor | Kim, SS | - |
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.