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College of Engineering(공과대학)Dept. of Bio and Brain Engineering(바이오및뇌공학과)BiS-Conference Papers(학술회의논문)

Nonlinearly modulated digital microactuators for nano-precision digital motion generation

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dc.contributor.authorLee, WC-
dc.contributor.authorJin, YH-
dc.contributor.authorCho, Young-Ho-
dc.date.accessioned2013-03-16T04:53:40Z-
dc.date.available2013-03-16T04:53:40Z-
dc.date.created2012-02-06-
dc.date.issued2002-01-20-
dc.identifier.citation15th IEEE International Conference on Micro Electro Mechanical Systems MEMS 2002, v., no., pp.594 - 597-
dc.identifier.urihttp://hdl.handle.net/10203/127625-
dc.languageENG-
dc.titleNonlinearly modulated digital microactuators for nano-precision digital motion generation-
dc.typeConference-
dc.identifier.scopusid2-s2.0-0036120833-
dc.type.rimsCONF-
dc.citation.beginningpage594-
dc.citation.endingpage597-
dc.citation.publicationname15th IEEE International Conference on Micro Electro Mechanical Systems MEMS 2002-
dc.identifier.conferencecountryUnited States-
dc.identifier.conferencecountryUnited States-
dc.contributor.localauthorCho, Young-Ho-
dc.contributor.nonIdAuthorLee, WC-
dc.contributor.nonIdAuthorJin, YH-
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BiS-Conference Papers(학술회의논문)
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