Heating mode transition in the capacitive mode of inductively coupled plasma and the electron temperature change during the E-H transition
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Chung, C.W. | - |
| dc.contributor.author | Kim, S.S. | - |
| dc.contributor.author | Chang, Hong-Young | - |
| dc.date.accessioned | 2013-03-16T04:09:57Z | - |
| dc.date.available | 2013-03-16T04:09:57Z | - |
| dc.date.created | 2012-02-06 | - |
| dc.date.issued | 2002-05-26 | - |
| dc.identifier.citation | 2002 IEEE International Conference on plasma Science, v., no., pp.290 - | - |
| dc.identifier.issn | 0730-9244 | - |
| dc.identifier.uri | http://hdl.handle.net/10203/127313 | - |
| dc.language | ENG | - |
| dc.publisher | IEEE | - |
| dc.title | Heating mode transition in the capacitive mode of inductively coupled plasma and the electron temperature change during the E-H transition | - |
| dc.type | Conference | - |
| dc.identifier.scopusid | 2-s2.0-0036372696 | - |
| dc.type.rims | CONF | - |
| dc.citation.beginningpage | 290 | - |
| dc.citation.publicationname | 2002 IEEE International Conference on plasma Science | - |
| dc.identifier.conferencecountry | Canada | - |
| dc.identifier.conferencecountry | Canada | - |
| dc.contributor.localauthor | Chang, Hong-Young | - |
| dc.contributor.nonIdAuthor | Chung, C.W. | - |
| dc.contributor.nonIdAuthor | Kim, S.S. | - |
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