DC Field | Value | Language |
---|---|---|
dc.contributor.author | Lee, Jingyu Hyeon | - |
dc.contributor.author | Lyu, Yi Yeol | - |
dc.contributor.author | Mah, Sang Kook | - |
dc.contributor.author | Yim, JinHyeong | - |
dc.contributor.author | Jeong, HyunDam | - |
dc.contributor.author | Lee, Mong Sup | - |
dc.contributor.author | Kim, Sang Youl | - |
dc.date.accessioned | 2013-03-16T04:05:14Z | - |
dc.date.available | 2013-03-16T04:05:14Z | - |
dc.date.created | 2012-02-06 | - |
dc.date.issued | 2002-04-01 | - |
dc.identifier.citation | Silicon Materials - Processing, Characterization and Reliability, v.716, no., pp.337 - 342 | - |
dc.identifier.issn | 0272-9172 | - |
dc.identifier.uri | http://hdl.handle.net/10203/127271 | - |
dc.language | ENG | - |
dc.title | Characterization of polysiloxane modified polysilsesquioxane films for low dielectric applications: Microstructure, electrical properties and mechanical properties | - |
dc.type | Conference | - |
dc.identifier.scopusid | 2-s2.0-0036951201 | - |
dc.type.rims | CONF | - |
dc.citation.volume | 716 | - |
dc.citation.beginningpage | 337 | - |
dc.citation.endingpage | 342 | - |
dc.citation.publicationname | Silicon Materials - Processing, Characterization and Reliability | - |
dc.identifier.conferencecountry | United States | - |
dc.identifier.conferencecountry | United States | - |
dc.contributor.localauthor | Kim, Sang Youl | - |
dc.contributor.nonIdAuthor | Lee, Jingyu Hyeon | - |
dc.contributor.nonIdAuthor | Lyu, Yi Yeol | - |
dc.contributor.nonIdAuthor | Mah, Sang Kook | - |
dc.contributor.nonIdAuthor | Yim, JinHyeong | - |
dc.contributor.nonIdAuthor | Jeong, HyunDam | - |
dc.contributor.nonIdAuthor | Lee, Mong Sup | - |
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