DC Field | Value | Language |
---|---|---|
dc.contributor.author | Chul-Hi Han | - |
dc.date.accessioned | 2013-03-16T02:32:41Z | - |
dc.date.available | 2013-03-16T02:32:41Z | - |
dc.date.created | 2012-02-06 | - |
dc.date.issued | 1999 | - |
dc.identifier.citation | MEMS, v., no., pp.17 - 21 | - |
dc.identifier.uri | http://hdl.handle.net/10203/126518 | - |
dc.language | ENG | - |
dc.title | Monolithic Integration of 3-D Electroplated Microstructures of Unlimited Number of Levels Using Planarization with a Sacrificial Metallic Mold (PSMM) | - |
dc.type | Conference | - |
dc.type.rims | CONF | - |
dc.citation.beginningpage | 17 | - |
dc.citation.endingpage | 21 | - |
dc.citation.publicationname | MEMS | - |
dc.identifier.conferencecountry | United States | - |
dc.identifier.conferencecountry | United States | - |
dc.contributor.localauthor | Chul-Hi Han | - |
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