Core-shell diamond-like silicon photonic crystals from 3D polymer templates created by holographic lithography

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We have fabricated diamond-like silicon photonic crystals through a sequential silica/silicon chemical vapor deposition (CVD) process from the corresponding polymer templates photopatterned by holographic lithography. Core-shell morphology is revealed due to the partial backfilling of the interstitial pores. To model the shell formation and investigate its effect to the bandgap properties, we developed a two-parameter level-set approach that closely approximated the core-shell morphology, and compare the bandgap simulation with the measured optical properties of the 3D crystals at each processing step. Both experimental and calculation results suggest that a complete filling is necessary to maximize the photonic bandgap in the diamond-like structures. (c) 2006 Optical Society of America.
Publisher
OPTICAL SOC AMER
Issue Date
2006-06
Language
English
Article Type
Article
Keywords

INTERFERENCE LITHOGRAPHY; MULTIBEAM INTERFERENCE; INFRARED WAVELENGTHS; BANDGAP CRYSTALS; LASER; OPAL; FABRICATION

Citation

OPTICS EXPRESS, v.14, no.13, pp.6297 - 6302

ISSN
1094-4087
DOI
10.1364/OE.14.006297
URI
http://hdl.handle.net/10203/12627
Appears in Collection
CBE-Journal Papers(저널논문)
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