Bandwidth Analysis of a Microgyroscope vibrating in two orthogonal axes on the substrate plane

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dc.contributor.authorHong,Y.S.ko
dc.contributor.authorLee, J.H,ko
dc.contributor.authorLee, C.S.ko
dc.contributor.authorJang,W.I.ko
dc.contributor.authorChoi, C.A.ko
dc.contributor.authorKim, Soohyunko
dc.contributor.authorKwak, Yoon Keunko
dc.date.accessioned2013-03-16T01:51:25Z-
dc.date.available2013-03-16T01:51:25Z-
dc.date.created2012-02-06-
dc.date.created2012-02-06-
dc.date.created2012-02-06-
dc.date.issued1999-03-
dc.identifier.citationSPIE International Symposium on Design, Test, and Microfabrication of MEMS and MOEMS, 1999, pp.939 - 947-
dc.identifier.urihttp://hdl.handle.net/10203/126213-
dc.languageEnglish-
dc.publisherSPIE-
dc.titleBandwidth Analysis of a Microgyroscope vibrating in two orthogonal axes on the substrate plane-
dc.typeConference-
dc.identifier.wosid000082111700105-
dc.identifier.scopusid2-s2.0-0032672392-
dc.type.rimsCONF-
dc.citation.beginningpage939-
dc.citation.endingpage947-
dc.citation.publicationnameSPIE International Symposium on Design, Test, and Microfabrication of MEMS and MOEMS, 1999-
dc.identifier.conferencecountryFR-
dc.identifier.conferencelocationParis-
dc.contributor.localauthorKim, Soohyun-
dc.contributor.localauthorKwak, Yoon Keun-
dc.contributor.nonIdAuthorHong,Y.S.-
dc.contributor.nonIdAuthorLee, J.H,-
dc.contributor.nonIdAuthorLee, C.S.-
dc.contributor.nonIdAuthorJang,W.I.-
dc.contributor.nonIdAuthorChoi, C.A.-
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ME-Conference Papers(학술회의논문)
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