A low-voltage two-axis electromagnetically actuated micromirror with bulk silicon mirror plates and torsion bars
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Cho I.-J. | - |
| dc.contributor.author | Yun K.-S. | - |
| dc.contributor.author | Lee H. | - |
| dc.contributor.author | Yoon J.-B. | - |
| dc.contributor.author | Yoon E. | - |
| dc.date.accessioned | 2013-03-16T01:20:15Z | - |
| dc.date.available | 2013-03-16T01:20:15Z | - |
| dc.date.created | 2012-02-06 | - |
| dc.date.issued | 2002-01-20 | - |
| dc.identifier.citation | 15th IEEE International Conference on Micro Electro Mechanical Systems MEMS 2002, v., no., pp.540 - 543 | - |
| dc.identifier.uri | http://hdl.handle.net/10203/125958 | - |
| dc.language | ENG | - |
| dc.title | A low-voltage two-axis electromagnetically actuated micromirror with bulk silicon mirror plates and torsion bars | - |
| dc.type | Conference | - |
| dc.identifier.scopusid | 2-s2.0-0036118156 | - |
| dc.type.rims | CONF | - |
| dc.citation.beginningpage | 540 | - |
| dc.citation.endingpage | 543 | - |
| dc.citation.publicationname | 15th IEEE International Conference on Micro Electro Mechanical Systems MEMS 2002 | - |
| dc.identifier.conferencecountry | United States | - |
| dc.identifier.conferencecountry | United States | - |
| dc.contributor.localauthor | Yoon E. | - |
| dc.contributor.nonIdAuthor | Cho I.-J. | - |
| dc.contributor.nonIdAuthor | Yun K.-S. | - |
| dc.contributor.nonIdAuthor | Lee H. | - |
| dc.contributor.nonIdAuthor | Yoon J.-B. | - |
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