Monolithic integration of 3-D electroplated microstructures with unlimited number of levels using planarization with a sacrificial metallic mold (PSMM)
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Yoon, Jun-Bo | ko |
| dc.contributor.author | Han, Chul-Hi | ko |
| dc.contributor.author | Yoon, Euisik | ko |
| dc.contributor.author | Kim, Choong Ki | ko |
| dc.date.accessioned | 2013-03-16T00:55:35Z | - |
| dc.date.available | 2013-03-16T00:55:35Z | - |
| dc.date.created | 2012-02-06 | - |
| dc.date.created | 2012-02-06 | - |
| dc.date.issued | 1999-01-17 | - |
| dc.identifier.citation | Proceedings of the 1999 12th IEEE International Conference on Micro Electro Mechanical Systems, MEMS, pp.624 - 629 | - |
| dc.identifier.uri | http://hdl.handle.net/10203/125755 | - |
| dc.language | English | - |
| dc.publisher | IEEE | - |
| dc.title | Monolithic integration of 3-D electroplated microstructures with unlimited number of levels using planarization with a sacrificial metallic mold (PSMM) | - |
| dc.type | Conference | - |
| dc.identifier.wosid | 000078743100109 | - |
| dc.identifier.scopusid | 2-s2.0-0032675869 | - |
| dc.type.rims | CONF | - |
| dc.citation.beginningpage | 624 | - |
| dc.citation.endingpage | 629 | - |
| dc.citation.publicationname | Proceedings of the 1999 12th IEEE International Conference on Micro Electro Mechanical Systems, MEMS | - |
| dc.identifier.conferencecountry | US | - |
| dc.identifier.conferencelocation | Orlando, FL, USA | - |
| dc.contributor.localauthor | Yoon, Jun-Bo | - |
| dc.contributor.localauthor | Han, Chul-Hi | - |
| dc.contributor.localauthor | Yoon, Euisik | - |
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