White light scanning interferometry for thickness measurement of thin film layers
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Kim Gee-Hong | ko |
| dc.contributor.author | Kim, Seung-Woo | ko |
| dc.date.accessioned | 2013-03-16T00:34:22Z | - |
| dc.date.available | 2013-03-16T00:34:22Z | - |
| dc.date.created | 2012-02-06 | - |
| dc.date.created | 2012-02-06 | - |
| dc.date.issued | 1999-07-21 | - |
| dc.identifier.citation | Proceedings of the 1999 Optical Diagnostics for Fluids/Heat/Combustion and Photomechanics for Solids, pp.239 - 246 | - |
| dc.identifier.uri | http://hdl.handle.net/10203/125604 | - |
| dc.language | English | - |
| dc.publisher | SPIE | - |
| dc.title | White light scanning interferometry for thickness measurement of thin film layers | - |
| dc.type | Conference | - |
| dc.identifier.wosid | 000083741900025 | - |
| dc.identifier.scopusid | 2-s2.0-0033351479 | - |
| dc.type.rims | CONF | - |
| dc.citation.beginningpage | 239 | - |
| dc.citation.endingpage | 246 | - |
| dc.citation.publicationname | Proceedings of the 1999 Optical Diagnostics for Fluids/Heat/Combustion and Photomechanics for Solids | - |
| dc.identifier.conferencecountry | US | - |
| dc.identifier.conferencelocation | Denver, CO, USA | - |
| dc.contributor.localauthor | Kim, Seung-Woo | - |
| dc.contributor.nonIdAuthor | Kim Gee-Hong | - |
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