A high-Q tunable micromechanical capacitor with movable dielectric for RF applications
- Issue Date
- 2000-12-10
- Language
- ENG
- Citation
2000 IEEE International Electron Devices Meeting, pp.489 - 492
- ISSN
- 0163-1918
- Appears in Collection
- EE-Conference Papers(학술회의논문)
- Files in This Item
- There are no files associated with this item.
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