The construction of computer-driven vacuum deposition system with in-situ thickness measurement
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 최석봉 | - |
| dc.contributor.author | 신성철 | - |
| dc.date.accessioned | 2013-03-15T23:40:07Z | - |
| dc.date.available | 2013-03-15T23:40:07Z | - |
| dc.date.created | 2012-02-06 | - |
| dc.date.issued | 1995 | - |
| dc.identifier.citation | 한국물리학회 학술논문발표회, v., no., pp.380 - | - |
| dc.identifier.uri | http://hdl.handle.net/10203/125167 | - |
| dc.language | ENG | - |
| dc.publisher | 한국물리학회 | - |
| dc.title | The construction of computer-driven vacuum deposition system with in-situ thickness measurement | - |
| dc.type | Conference | - |
| dc.type.rims | CONF | - |
| dc.citation.beginningpage | 380 | - |
| dc.citation.publicationname | 한국물리학회 학술논문발표회 | - |
| dc.identifier.conferencecountry | South Korea | - |
| dc.identifier.conferencecountry | South Korea | - |
| dc.contributor.localauthor | 신성철 | - |
| dc.contributor.nonIdAuthor | 최석봉 | - |
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