A Study on Production Management of Etching Processes for Semiconductor Manufacturing반도체 제조를 위한 엣칭공정의 생산관리에 관한 연구
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Shin, Y. | - |
| dc.contributor.author | Seo, J. | - |
| dc.contributor.author | Lee, Tae-Eog | - |
| dc.date.accessioned | 2013-03-15T21:47:12Z | - |
| dc.date.available | 2013-03-15T21:47:12Z | - |
| dc.date.created | 2012-02-06 | - |
| dc.date.issued | 1996-09 | - |
| dc.identifier.citation | 대한산업공학회 96년도 추계학술대회, v., no., pp.34 - 34 | - |
| dc.identifier.uri | http://hdl.handle.net/10203/124230 | - |
| dc.language | KOR | - |
| dc.publisher | 대한산업공학회 | - |
| dc.title | A Study on Production Management of Etching Processes for Semiconductor Manufacturing | - |
| dc.title.alternative | 반도체 제조를 위한 엣칭공정의 생산관리에 관한 연구 | - |
| dc.type | Conference | - |
| dc.type.rims | CONF | - |
| dc.citation.beginningpage | 34 | - |
| dc.citation.endingpage | 34 | - |
| dc.citation.publicationname | 대한산업공학회 96년도 추계학술대회 | - |
| dc.identifier.conferencecountry | South Korea | - |
| dc.identifier.conferencecountry | South Korea | - |
| dc.contributor.localauthor | Lee, Tae-Eog | - |
| dc.contributor.nonIdAuthor | Shin, Y. | - |
| dc.contributor.nonIdAuthor | Seo, J. | - |
- Appears in Collection
- IE-Conference Papers(학술회의논문)
- Files in This Item
- There are no files associated with this item.
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.