Intrinsic charaterization of silicon surface after etching with liquid/gas phase of HF acid
- Publisher
- IUMRS
- Issue Date
- 1995
- Language
- ENG
- Citation
3rd IUMRS International Conference in Asia, pp.783 - 788
- Appears in Collection
- CBE-Conference Papers(학술회의논문)
- Files in This Item
- There are no files associated with this item.
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