Preparation and characterization of hydrogenated aluminum nitride ( AlN:H ) films by sputtering and application to SAW devices
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Lee, Jai Young | - |
| dc.date.accessioned | 2013-03-15T21:19:19Z | - |
| dc.date.available | 2013-03-15T21:19:19Z | - |
| dc.date.created | 2012-02-06 | - |
| dc.date.issued | 1997 | - |
| dc.identifier.citation | JIM, v., no., pp. - | - |
| dc.identifier.uri | http://hdl.handle.net/10203/123994 | - |
| dc.language | ENG | - |
| dc.title | Preparation and characterization of hydrogenated aluminum nitride ( AlN:H ) films by sputtering and application to SAW devices | - |
| dc.type | Conference | - |
| dc.type.rims | CONF | - |
| dc.citation.publicationname | JIM | - |
| dc.identifier.conferencecountry | Japan | - |
| dc.contributor.localauthor | Lee, Jai Young | - |
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