가스상 세정공정에서 자연 산화막 제거에 대한 UV 조사의 영향Effect of UV Exposure on the Native Oxide Removal in Dry Cleaning Process
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 권성구 | - |
| dc.contributor.author | 김도현 | - |
| dc.date.accessioned | 2013-03-15T21:18:40Z | - |
| dc.date.available | 2013-03-15T21:18:40Z | - |
| dc.date.created | 2012-02-06 | - |
| dc.date.issued | 1996-10 | - |
| dc.identifier.citation | KIChE Fall meeting, v.2, no.2, pp.2515 - 2518 | - |
| dc.identifier.uri | http://hdl.handle.net/10203/123989 | - |
| dc.language | KOR | - |
| dc.title | 가스상 세정공정에서 자연 산화막 제거에 대한 UV 조사의 영향 | - |
| dc.title.alternative | Effect of UV Exposure on the Native Oxide Removal in Dry Cleaning Process | - |
| dc.type | Conference | - |
| dc.type.rims | CONF | - |
| dc.citation.volume | 2 | - |
| dc.citation.issue | 2 | - |
| dc.citation.beginningpage | 2515 | - |
| dc.citation.endingpage | 2518 | - |
| dc.citation.publicationname | KIChE Fall meeting | - |
| dc.identifier.conferencecountry | South Korea | - |
| dc.identifier.conferencecountry | South Korea | - |
| dc.contributor.localauthor | 김도현 | - |
| dc.contributor.nonIdAuthor | 권성구 | - |
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