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College of Engineering(공과대학)School of Mechanical and Aerospace Engineering(기계항공공학부)Dept. of Mechanical Engineering(기계공학과)ME-Conference Papers(학술회의논문)

An Electrostatically-tunable Switching Micromirror using (110) Silicon Wafers

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dc.contributor.authorSeo, Kyoung-Sun-
dc.contributor.authorCho, Young-Ho-
dc.contributor.authorYoun, Sung-Kie-
dc.date.accessioned2013-03-15T21:10:03Z-
dc.date.available2013-03-15T21:10:03Z-
dc.date.created2012-02-06-
dc.date.issued1996-08-
dc.identifier.citationTech. Dig. IEEE/LEOS 1996 Summer Topical Meetings: Optical MEMS and Their Applications, v., no., pp.41 - 42-
dc.identifier.urihttp://hdl.handle.net/10203/123915-
dc.languageENG-
dc.titleAn Electrostatically-tunable Switching Micromirror using (110) Silicon Wafers-
dc.typeConference-
dc.type.rimsCONF-
dc.citation.beginningpage41-
dc.citation.endingpage42-
dc.citation.publicationnameTech. Dig. IEEE/LEOS 1996 Summer Topical Meetings: Optical MEMS and Their Applications-
dc.identifier.conferencecountryUnited States-
dc.identifier.conferencecountryUnited States-
dc.contributor.localauthorCho, Young-Ho-
dc.contributor.localauthorYoun, Sung-Kie-
dc.contributor.nonIdAuthorSeo, Kyoung-Sun-
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BiS-Conference Papers(학술회의논문)ME-Conference Papers(학술회의논문)
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