Numerical Simulation of Transport Phenomena in Cu MOCVD Vertical Reactor
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Chung, W. Y. | - |
| dc.contributor.author | Kim, DoHyun | - |
| dc.date.accessioned | 2013-03-15T20:24:15Z | - |
| dc.date.available | 2013-03-15T20:24:15Z | - |
| dc.date.created | 2012-02-06 | - |
| dc.date.issued | 1995-10 | - |
| dc.identifier.citation | Proc. Third IUMRS-ICA-95, v.2, no., pp.831 - 836 | - |
| dc.identifier.uri | http://hdl.handle.net/10203/123530 | - |
| dc.language | ENG | - |
| dc.title | Numerical Simulation of Transport Phenomena in Cu MOCVD Vertical Reactor | - |
| dc.type | Conference | - |
| dc.type.rims | CONF | - |
| dc.citation.volume | 2 | - |
| dc.citation.beginningpage | 831 | - |
| dc.citation.endingpage | 836 | - |
| dc.citation.publicationname | Proc. Third IUMRS-ICA-95 | - |
| dc.identifier.conferencecountry | South Korea | - |
| dc.identifier.conferencecountry | South Korea | - |
| dc.contributor.localauthor | Kim, DoHyun | - |
| dc.contributor.nonIdAuthor | Chung, W. Y. | - |
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