DSpace at KOASAS: Electron temperature control with grid in inductively coupled Ar plasma

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College of Natural Sciences(자연과학대학)Dept. of Physics(물리학과)PH-Conference Papers(학술회의논문)

Electron temperature control with grid in inductively coupled Ar plasma

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Hong, IH / Seo, SH / Chang, Hong-Young researcher

Publisher: American Vacuum Society

Issue Date: 1996

Language: ENG

Citation: 43th International symp.American Vac. Soc

URI: http://hdl.handle.net/10203/123335

Appears in Collection: PH-Conference Papers(학술회의논문)

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