DSpace at KOASAS: Effect of the Interface on Stress in Multi-Stacked Polysilicon Film

DSpace at KOASAS

College of Engineering(공과대학)Dept. of Materials Science and Engineering(신소재공학과)MS-Conference Papers(학술회의논문)

Effect of the Interface on Stress in Multi-Stacked Polysilicon Film

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Publisher: 대한전기학회

Issue Date: 1998-01-01

Language: KOR

Citation: 대한전기학회 MEMS 연구회 학술발표회

URI: http://hdl.handle.net/10203/123200

Appears in Collection: MS-Conference Papers(학술회의논문)

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Effect of the Interface on Stress in Multi-Stacked Polysilicon Film

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