Effect of the Interface on Stress in Multi-Stacked Polysilicon Film

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Publisher
대한전기학회
Issue Date
1998-01-01
Language
KOR
Citation

대한전기학회 MEMS 연구회 학술발표회

URI
http://hdl.handle.net/10203/123200
Appears in Collection
MS-Conference Papers(학술회의논문)
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