A 6 Degree-of-Freedom Micro Positioning Manipulator Using Piezoeletric Elements

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Issue Date
1996-05
Language
ENG
Citation

13th Symposium on Engineering Applications of Mechanics, Manuf. Sci. and Eng., pp.253 - 259

URI
http://hdl.handle.net/10203/123122
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ME-Conference Papers(학술회의논문)ME-Conference Papers(학술회의논문)
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