Properties of Phosphorus-Doped Microcrystalline Si Thin Films by PECVD

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Issue Date
1995
Language
ENG
Citation

Fabrication and Characterization of Advanced Matrials, Proc. of 3rd IUMRS International Conference in Asia, pp.1131 - 1136

URI
http://hdl.handle.net/10203/122808
Appears in Collection
MS-Conference Papers(학술회의논문)
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