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College of Natural Sciences(자연과학대학)Dept. of Physics(물리학과)PH-Conference Papers(학술회의논문)

유도결합 플라즈마에서 E-H 모드 전이 및 전자에너지 분포함수의 주파수 특성 연구

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서상훈 / 홍정인 / 배근희 / 장홍영researcher
Publisher
한국진공학회
Issue Date
1998
Language
KOR
Citation

한국진공학회 제15회 학술발표회

URI
http://hdl.handle.net/10203/122467
Appears in Collection
PH-Conference Papers(학술회의논문)
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