고밀도 Helicon Plasma를 이용한 저유전율의 SiOF박막 증착 연구

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Publisher
한국진공학회
Issue Date
1995
Language
KOR
Citation

한국진공학회 제9회 학술발표회

URI
http://hdl.handle.net/10203/122466
Appears in Collection
PH-Conference Papers(학술회의논문)
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