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College of Natural Sciences(자연과학대학)Dept. of Physics(물리학과)PH-Conference Papers(학술회의논문)

Determination of the Relative F Concentration and its Radial Profile by Plasma Parameter Normalization in and Electron cyclotron Resonance SF6/Ar Discharge

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dc.contributor.authorKim, YJ-
dc.contributor.authorLee, PW-
dc.contributor.authorChang, Hong-Young-
dc.date.accessioned2013-03-15T18:00:16Z-
dc.date.available2013-03-15T18:00:16Z-
dc.date.created2012-02-06-
dc.date.issued1995-
dc.identifier.citationECS Meeting , v., no., pp. --
dc.identifier.urihttp://hdl.handle.net/10203/122115-
dc.languageENG-
dc.publisherThe electrochemical society-
dc.titleDetermination of the Relative F Concentration and its Radial Profile by Plasma Parameter Normalization in and Electron cyclotron Resonance SF6/Ar Discharge-
dc.typeConference-
dc.type.rimsCONF-
dc.citation.publicationnameECS Meeting-
dc.identifier.conferencecountryUnited States-
dc.identifier.conferencecountryUnited States-
dc.contributor.localauthorChang, Hong-Young-
dc.contributor.nonIdAuthorKim, YJ-
dc.contributor.nonIdAuthorLee, PW-
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PH-Conference Papers(학술회의논문)
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