DC Field | Value | Language |
---|---|---|
dc.contributor.author | Kim, YJ | - |
dc.contributor.author | Lee, PW | - |
dc.contributor.author | Chang, Hong-Young | - |
dc.date.accessioned | 2013-03-15T18:00:16Z | - |
dc.date.available | 2013-03-15T18:00:16Z | - |
dc.date.created | 2012-02-06 | - |
dc.date.issued | 1995 | - |
dc.identifier.citation | ECS Meeting , v., no., pp. - | - |
dc.identifier.uri | http://hdl.handle.net/10203/122115 | - |
dc.language | ENG | - |
dc.publisher | The electrochemical society | - |
dc.title | Determination of the Relative F Concentration and its Radial Profile by Plasma Parameter Normalization in and Electron cyclotron Resonance SF6/Ar Discharge | - |
dc.type | Conference | - |
dc.type.rims | CONF | - |
dc.citation.publicationname | ECS Meeting | - |
dc.identifier.conferencecountry | United States | - |
dc.identifier.conferencecountry | United States | - |
dc.contributor.localauthor | Chang, Hong-Young | - |
dc.contributor.nonIdAuthor | Kim, YJ | - |
dc.contributor.nonIdAuthor | Lee, PW | - |
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.