The Effect of Electron Emission on The Roughness of Silicon Films in Catalytic CVD

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Issue Date
1998
Language
ENG
Citation

Proceedings of the 3rd Pacific Rim International Conference (PRICM-3), pp.2733 - 2738

URI
http://hdl.handle.net/10203/122096
Appears in Collection
MS-Conference Papers(학술회의논문)
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