Design and Characteristics of a 6-Axis UltraprecisionMicropositioning Stage
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Ryu, J.W. | - |
| dc.contributor.author | Gweon, Dae-Gab | - |
| dc.date.accessioned | 2013-03-15T17:21:07Z | - |
| dc.date.available | 2013-03-15T17:21:07Z | - |
| dc.date.created | 2012-02-06 | - |
| dc.date.issued | 1997 | - |
| dc.identifier.citation | lnternational Precision Engineering Seminar, v., no., pp.412 - 416 | - |
| dc.identifier.uri | http://hdl.handle.net/10203/121771 | - |
| dc.language | ENG | - |
| dc.title | Design and Characteristics of a 6-Axis UltraprecisionMicropositioning Stage | - |
| dc.type | Conference | - |
| dc.type.rims | CONF | - |
| dc.citation.beginningpage | 412 | - |
| dc.citation.endingpage | 416 | - |
| dc.citation.publicationname | lnternational Precision Engineering Seminar | - |
| dc.identifier.conferencecountry | Germany | - |
| dc.identifier.conferencecountry | Germany | - |
| dc.contributor.localauthor | Gweon, Dae-Gab | - |
| dc.contributor.nonIdAuthor | Ryu, J.W. | - |
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