Electrical characteristics of n- and p-MOSFETs with N2O-reoxidized NH3-nitrided N2O oxides as gate dielectrics

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Publisher
SPIE Microelectronic Device and Multilevel Interconnection Technology
Issue Date
1995-04
Language
ENG
Citation

SPIE Microelectronic Device and Multilevel Interconnection Technology, pp.208 - 217

URI
http://hdl.handle.net/10203/121539
Appears in Collection
EE-Conference Papers(학술회의논문)
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