Characteristics of Thermal Nitride Grown by IR Furnace
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Hyung-Cheol Shin | - |
| dc.date.accessioned | 2013-03-15T16:46:22Z | - |
| dc.date.available | 2013-03-15T16:46:22Z | - |
| dc.date.created | 2012-02-06 | - |
| dc.date.issued | 1998 | - |
| dc.identifier.citation | IUMRS-ICEM-98, v., no., pp.106 - 106 | - |
| dc.identifier.uri | http://hdl.handle.net/10203/121472 | - |
| dc.language | ENG | - |
| dc.title | Characteristics of Thermal Nitride Grown by IR Furnace | - |
| dc.type | Conference | - |
| dc.type.rims | CONF | - |
| dc.citation.beginningpage | 106 | - |
| dc.citation.endingpage | 106 | - |
| dc.citation.publicationname | IUMRS-ICEM-98 | - |
| dc.identifier.conferencecountry | South Korea | - |
| dc.identifier.conferencecountry | South Korea | - |
| dc.contributor.localauthor | Hyung-Cheol Shin | - |
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