Characteristics of Thermal Nitride Grown by IR Furnace

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dc.contributor.authorHyung-Cheol Shin-
dc.date.accessioned2013-03-15T16:46:22Z-
dc.date.available2013-03-15T16:46:22Z-
dc.date.created2012-02-06-
dc.date.issued1998-
dc.identifier.citationIUMRS-ICEM-98, v., no., pp.106 - 106-
dc.identifier.urihttp://hdl.handle.net/10203/121472-
dc.languageENG-
dc.titleCharacteristics of Thermal Nitride Grown by IR Furnace-
dc.typeConference-
dc.type.rimsCONF-
dc.citation.beginningpage106-
dc.citation.endingpage106-
dc.citation.publicationnameIUMRS-ICEM-98-
dc.identifier.conferencecountrySouth Korea-
dc.identifier.conferencecountrySouth Korea-
dc.contributor.localauthorHyung-Cheol Shin-
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