Integration of Solenoid-Type 3D Micro-Coils by 3D Photolithography and Electroplating

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Issue Date
1998
Language
KOR
Citation

대한전기학회 MEMS 연구회 학술발표회, pp.93 - 99

URI
http://hdl.handle.net/10203/121296
Appears in Collection
EE-Conference Papers(학술회의논문)
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