Zero-Dimensional Modeling of an Ar/CHF3/CF4 Gas Discharge in an Inductively Coupled Plasma Device

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Issue Date
1997
Language
KOR
Citation

Bull, Kor. Phys. Soc., pp.140 - 140

URI
http://hdl.handle.net/10203/121143
Appears in Collection
PH-Conference Papers(학술회의논문)
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