Design, Fabrication and Uncertainty Evaluation of a Surface-micromachined Capacitive Microaccelerometer

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dc.contributor.authorHan, KH-
dc.contributor.authorKim, JP-
dc.contributor.authorCho, Young-Ho-
dc.date.accessioned2013-03-15T15:19:38Z-
dc.date.available2013-03-15T15:19:38Z-
dc.date.created2012-02-06-
dc.date.issued1998-11-15-
dc.identifier.citationInter. Mechanical Engineering Congress and Exposition (IMECE '98), ASME, v., no., pp.347 - 352-
dc.identifier.urihttp://hdl.handle.net/10203/120697-
dc.languageENG-
dc.titleDesign, Fabrication and Uncertainty Evaluation of a Surface-micromachined Capacitive Microaccelerometer-
dc.typeConference-
dc.type.rimsCONF-
dc.citation.beginningpage347-
dc.citation.endingpage352-
dc.citation.publicationnameInter. Mechanical Engineering Congress and Exposition (IMECE '98), ASME-
dc.identifier.conferencecountryUnited States-
dc.identifier.conferencecountryUnited States-
dc.contributor.localauthorCho, Young-Ho-
dc.contributor.nonIdAuthorHan, KH-
dc.contributor.nonIdAuthorKim, JP-
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BiS-Conference Papers(학술회의논문)
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