Layer-by-layer in situ stress measurements of metallic multilayers with atomic-layer sensitivity
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Kim, YS | - |
| dc.contributor.author | Shin, Sung-Chul | - |
| dc.date.accessioned | 2013-03-15T14:15:31Z | - |
| dc.date.available | 2013-03-15T14:15:31Z | - |
| dc.date.created | 2012-02-06 | - |
| dc.date.issued | 1998 | - |
| dc.identifier.citation | International Symposium Metallic Multilayes, v., no., pp. - | - |
| dc.identifier.uri | http://hdl.handle.net/10203/120152 | - |
| dc.language | ENG | - |
| dc.title | Layer-by-layer in situ stress measurements of metallic multilayers with atomic-layer sensitivity | - |
| dc.type | Conference | - |
| dc.type.rims | CONF | - |
| dc.citation.publicationname | International Symposium Metallic Multilayes | - |
| dc.identifier.conferencecountry | Canada | - |
| dc.identifier.conferencecountry | Canada | - |
| dc.contributor.localauthor | Shin, Sung-Chul | - |
| dc.contributor.nonIdAuthor | Kim, YS | - |
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