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Multi-spot laser lock-in thermography for real-time imaging of cracks in semiconductor chips during a manufacturing process Yang, Jinyeol; Hwang, Soonkyu; An, Yun-Kyu; Lee, Kyuhang; Sohn, Hoon, JOURNAL OF MATERIALS PROCESSING TECHNOLOGY, v.229, pp.94 - 101, 2016-03 |
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