A practical view of stability analysis in discrete event dynamic systems: a case study on plasma etching system
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Cho, Kwang-Hyun | ko |
| dc.contributor.author | Lim, Jong-Tae | ko |
| dc.date.accessioned | 2013-03-15T13:47:44Z | - |
| dc.date.available | 2013-03-15T13:47:44Z | - |
| dc.date.created | 2012-02-06 | - |
| dc.date.created | 2012-02-06 | - |
| dc.date.issued | 1998-10-11 | - |
| dc.identifier.citation | IEEE Conference on Systems, Man, and Cybernatics, pp.627 - 631 | - |
| dc.identifier.issn | 0884-3627 | - |
| dc.identifier.uri | http://hdl.handle.net/10203/119966 | - |
| dc.language | English | - |
| dc.publisher | IEEE | - |
| dc.title | A practical view of stability analysis in discrete event dynamic systems: a case study on plasma etching system | - |
| dc.type | Conference | - |
| dc.identifier.wosid | 000077033700109 | - |
| dc.identifier.scopusid | 2-s2.0-0032267277 | - |
| dc.type.rims | CONF | - |
| dc.citation.beginningpage | 627 | - |
| dc.citation.endingpage | 631 | - |
| dc.citation.publicationname | IEEE Conference on Systems, Man, and Cybernatics | - |
| dc.identifier.conferencecountry | US | - |
| dc.identifier.conferencelocation | San Diego, CA, USA | - |
| dc.contributor.localauthor | Cho, Kwang-Hyun | - |
| dc.contributor.localauthor | Lim, Jong-Tae | - |
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