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A practical view of stability analysis in discrete event dynamic systems: a case study on plasma etching system

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Cho, Kwang-Hyunresearcher / Lim, Jong-Taeresearcher
Publisher
IEEE
Issue Date
1998-10-11
Language
English
Citation

IEEE Conference on Systems, Man, and Cybernatics, pp.627 - 631

ISSN
0884-3627
URI
http://hdl.handle.net/10203/119966
Appears in Collection
BiS-Conference Papers(학술회의논문)EE-Conference Papers(학술회의논문)
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