Diffusion barrier properties of the TiN films prepared by ECR PECVD method.
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Park, Hye-Lyun | ko |
| dc.contributor.author | Jang, Seong-Soo | ko |
| dc.contributor.author | Lee, Won-Jong | ko |
| dc.date.accessioned | 2013-03-15T13:00:15Z | - |
| dc.date.available | 2013-03-15T13:00:15Z | - |
| dc.date.created | 2012-02-06 | - |
| dc.date.created | 2012-02-06 | - |
| dc.date.issued | 1998-04-13 | - |
| dc.identifier.citation | Proceedings of the 1998 MRS Spring Symposium, pp.409 - 0 | - |
| dc.identifier.issn | 0272-9172 | - |
| dc.identifier.uri | http://hdl.handle.net/10203/119672 | - |
| dc.language | English | - |
| dc.publisher | MRS | - |
| dc.title | Diffusion barrier properties of the TiN films prepared by ECR PECVD method. | - |
| dc.type | Conference | - |
| dc.identifier.wosid | 000077430000070 | - |
| dc.identifier.scopusid | 2-s2.0-0032303787 | - |
| dc.type.rims | CONF | - |
| dc.citation.beginningpage | 409 | - |
| dc.citation.endingpage | 0 | - |
| dc.citation.publicationname | Proceedings of the 1998 MRS Spring Symposium | - |
| dc.identifier.conferencecountry | US | - |
| dc.identifier.conferencelocation | San Francisco, CA, USA | - |
| dc.contributor.localauthor | Lee, Won-Jong | - |
| dc.contributor.nonIdAuthor | Park, Hye-Lyun | - |
| dc.contributor.nonIdAuthor | Jang, Seong-Soo | - |
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