Relation Between Conductivity and Structure of RF Sputtered Lithium Phosphorous Oxynitride Amorphous Thin Film

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dc.contributor.authorKwon, Hyuk-Sang-
dc.contributor.authorKim, Nam-Seok-
dc.date.accessioned2013-03-15T12:56:29Z-
dc.date.available2013-03-15T12:56:29Z-
dc.date.created2012-02-06-
dc.date.issued1995-01-01-
dc.identifier.citationProceedings of the 2nd Pacific Rim International Conference on Artificial Intelligence(PRICAI'92), v., no., pp.1593 - 1598-
dc.identifier.urihttp://hdl.handle.net/10203/119647-
dc.languageENG-
dc.titleRelation Between Conductivity and Structure of RF Sputtered Lithium Phosphorous Oxynitride Amorphous Thin Film-
dc.typeConference-
dc.type.rimsCONF-
dc.citation.beginningpage1593-
dc.citation.endingpage1598-
dc.citation.publicationnameProceedings of the 2nd Pacific Rim International Conference on Artificial Intelligence(PRICAI'92)-
dc.identifier.conferencecountrySouth Korea-
dc.identifier.conferencecountrySouth Korea-
dc.contributor.localauthorKwon, Hyuk-Sang-
dc.contributor.nonIdAuthorKim, Nam-Seok-
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MS-Conference Papers(학술회의논문)
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