Acid Diffusion Control in Chemically Amplified Positive Resists
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Kwon, Young-Gil | - |
| dc.contributor.author | Choi, Jae-Hak | - |
| dc.contributor.author | Kim, Jin-Baek | - |
| dc.date.accessioned | 2013-03-15T12:49:06Z | - |
| dc.date.available | 2013-03-15T12:49:06Z | - |
| dc.date.created | 2012-02-06 | - |
| dc.date.issued | 1998-04 | - |
| dc.identifier.citation | 한국고분자학회 1998년도 춘계 학술대회 , v., no., pp.36 - 37 | - |
| dc.identifier.uri | http://hdl.handle.net/10203/119591 | - |
| dc.language | ENG | - |
| dc.publisher | 한국고분자학회 | - |
| dc.title | Acid Diffusion Control in Chemically Amplified Positive Resists | - |
| dc.type | Conference | - |
| dc.type.rims | CONF | - |
| dc.citation.beginningpage | 36 | - |
| dc.citation.endingpage | 37 | - |
| dc.citation.publicationname | 한국고분자학회 1998년도 춘계 학술대회 | - |
| dc.identifier.conferencecountry | South Korea | - |
| dc.contributor.localauthor | Kim, Jin-Baek | - |
| dc.contributor.nonIdAuthor | Kwon, Young-Gil | - |
| dc.contributor.nonIdAuthor | Choi, Jae-Hak | - |
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