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College of Engineering(공과대학)Dept. of Materials Science and Engineering(신소재공학과)MS-Conference Papers(학술회의논문)

Pt/Ti/SiO2/Si 기판의 증착조건 및 열처리 조건이 PZT 박막의 결정구조 및 전기적 특성에 미치는 영향에 관한 연구

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이원종researcher / 남효진 / 김현호
Issue Date
1997-01-01
Language
KOR
Citation

제5회 한국반도체 학술대회, pp.0 - 0

URI
http://hdl.handle.net/10203/119521
Appears in Collection
MS-Conference Papers(학술회의논문)
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