DC Field | Value | Language |
---|---|---|
dc.contributor.author | Ko, JS | - |
dc.contributor.author | Cho, Young-Ho | - |
dc.contributor.author | Lee, HJ | - |
dc.contributor.author | Park, K | - |
dc.date.accessioned | 2013-03-15T12:35:54Z | - |
dc.date.available | 2013-03-15T12:35:54Z | - |
dc.date.created | 2012-02-06 | - |
dc.date.issued | 1997 | - |
dc.identifier.citation | Proc. International MEMS Workshop (iMEMS '97), v., no., pp.6 - 9 | - |
dc.identifier.uri | http://hdl.handle.net/10203/119516 | - |
dc.language | ENG | - |
dc.title | Design and Batch-fabrication of Piezoresistive Cantilever Microaccelerometers with Symmetrically Bonded Proof-mass | - |
dc.type | Conference | - |
dc.type.rims | CONF | - |
dc.citation.beginningpage | 6 | - |
dc.citation.endingpage | 9 | - |
dc.citation.publicationname | Proc. International MEMS Workshop (iMEMS '97) | - |
dc.identifier.conferencecountry | Singapore | - |
dc.identifier.conferencecountry | Singapore | - |
dc.contributor.localauthor | Cho, Young-Ho | - |
dc.contributor.nonIdAuthor | Ko, JS | - |
dc.contributor.nonIdAuthor | Lee, HJ | - |
dc.contributor.nonIdAuthor | Park, K | - |
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