Design and Batch-fabrication of Piezoresistive Cantilever Microaccelerometers with Symmetrically Bonded Proof-mass

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dc.contributor.authorKo, JS-
dc.contributor.authorCho, Young-Ho-
dc.contributor.authorLee, HJ-
dc.contributor.authorPark, K-
dc.date.accessioned2013-03-15T12:35:54Z-
dc.date.available2013-03-15T12:35:54Z-
dc.date.created2012-02-06-
dc.date.issued1997-
dc.identifier.citationProc. International MEMS Workshop (iMEMS '97), v., no., pp.6 - 9-
dc.identifier.urihttp://hdl.handle.net/10203/119516-
dc.languageENG-
dc.titleDesign and Batch-fabrication of Piezoresistive Cantilever Microaccelerometers with Symmetrically Bonded Proof-mass-
dc.typeConference-
dc.type.rimsCONF-
dc.citation.beginningpage6-
dc.citation.endingpage9-
dc.citation.publicationnameProc. International MEMS Workshop (iMEMS '97)-
dc.identifier.conferencecountrySingapore-
dc.identifier.conferencecountrySingapore-
dc.contributor.localauthorCho, Young-Ho-
dc.contributor.nonIdAuthorKo, JS-
dc.contributor.nonIdAuthorLee, HJ-
dc.contributor.nonIdAuthorPark, K-
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BiS-Conference Papers(학술회의논문)
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