Surface-micromachined tunable microgyroscope

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Issue Date
1996-11-18
Language
ENG
Citation

Proceedings of the 1996 IEEE Conference on Emerging Technologies and Factory Automation, v.2, pp.498 - 502

URI
http://hdl.handle.net/10203/119508
Appears in Collection
EE-Conference Papers(학술회의논문)
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